The MIRAI project presented a display booth at the "nano tech 2003 +Future", a large scale international exhibition on nanotechnology co-organized by the New Energy and Industrial Technology Development Organization (NEDO), the Japan External Trade Organization (JETRO) and the National Institute of Advanced Industrial Science and Technology (AIST). The "nano tech 2003 +Future" was opened for three days of February 26, to 28, 2003 at the Makuhari Messe, Chiba in Japan, and about 25,000 persons participated. At our booth, we demonstrated that the LSI technology is now really nano-scale technology in that it fully utilizes advanced nano-scale material processes and metrology.

> Photo of the day

> Exhibition panel

1. MIRAI Project; PDF 1,840KB
2. Nanoscale Material Control for Advanced High-Performance LSI (1); PDF 1,409KB
3. Nanoscale Material Control for Advanced High-Performance LSI (2); PDF 6,556KB